Comparison effect of spin speeds and substrate layers on properties of doubly doped tin oxide thin films prepared by sol-gel spin coating method

摘要

Tin oxide thin films doubly doped with antimony and fluorine (Sb, F) were deposited bysol-gel spin coating method at different spin speeds and substrate layers on glass substrate.Effect of spin speeds and substrate layers on the characterizations of the films wasinvestigated. X-ray diffraction studies revealed that antimony and fluorine have beensuccessfully doped into the SnO2 thin films and all the prepared films were singlecrystalline in nature and exhibited orthorhombic structure with preferential orientation{021} family of planes. As the tin oxide thin films have quite often structure of tetragonalpolycrystalline, this obtained orthorhombic structure is rarely in terms of literature.Although intensity of preferential orientation changed, its orientation did not change withincreasing spin speeds and substrate layers. Also, peak intensity of the films prepared with6 substrate layers was bigger than 5 substrate layers, but crystallinity in 5 substrate layerswas better than 6 substrate layers. Transmittance (90-95%.) values found in this studywere to be much better than previously reported values (50-80%). Together with thesestudies, PLQY value of an inorganic material such as tin oxide which weakly emit wasmeasured. Eventually, the obtained results revealed that properties of the thin films weregreatly affected by spin speeds and substrate layers.