Structure and Optical Properties of Al_(1-x)Sc_xN Thin Films

摘要

In this study, c-axis oriented AlN and Al_(1-x)Sc_xN films have been successfully grown on Si (100) and quartz glass by DC magnetron reactive sputtering method. The XRD patterns show that the crystal structure of the Al_(1-x)Sc_xN films is (002) orientation. The grain size and band gap energy (Eg) of the Al_(1-x)Sc_xN films decrease as the Sc concentration increases. The frequency of the E2 (high) mode observed in the Al_(1-x)Sc_xN films shows higher red shift compared to that observed in AlN film and the peak shifts to the low wave number with the increasing of Sc concentration.