Hafnium-doped zinc oxide (HZO) has been recently demonstrated to be implemented as a transparent conductingoxide (TCO) material in photovoltaic applications but its plasmonic properties are left untouched. In this work, wesystematically investigate the plasmonic properties of gold nanoparticle (Au NP) arrays on thin HZO film, for differentratios of Hf dopants to Zinc oxide (ZnO) film. A localized surface plasmon resonant (LSPR) mode and two Braggmodes (due to the coupling of plasmon modes inside the film to array periodicity) are observed in the proposedstructure. Resonant excitation of these modes produces large field enhancement at the surface of the NPs as well asAu NP/HZO film interface and was observed with FDTD simulations. The optimized plasmonic structure will befabricated on quartz crystal microbalance (QCM) using laser interference lithography, based on the plasmonicresonant position and the SERS (surface enhanced Raman scattering) intensity, and it will be integrated to amicrofluidic device in the configuration of the lab-on-a-chip concept for biosensing applications.
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