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RF Sputtering Pressure Controlled Switching Characteristics of ZnO-based Flexible-Transparent Resistive Memory Devices

机译:RF溅射压控式切换特性ZnO的柔性透明电阻存储器件

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Introduction: Flexible and transparent resistive memory devices have been widely investigated due to their potential use in wearable electronics. The mechanism of resistive memory is controlled by the formation and rupture of the conducting filament inside the storage layer. ZnO is one of the most promising storage layer materials for fabricating such memory devices;ZnO is highly transparent in visible light, low cost and environment-friendly.Various device design and techniques have been proposed in order to improve the ZnO-based resistive memory.4However, based on our knowledge, the importance of sputtering pressure as a processing parameter in fabricating the memory device is still overlooked. In this work, we found that the switching characteristics are significantly influenced by the sputtering pressure.
机译:简介:由于其在可穿戴电子设备中的潜在使用,灵活透明的电阻存储器设备已被广泛调查。电阻存储器的机理由存储层内部导电灯丝的形成和破裂控制。 ZnO是用于制造这种存储器件的最有前途的存储层材料之一; ZnO以可见光,成本低,环保型高度透明。已经提出了一种芳烃设计和技术,以改善ZnO基电阻存储器。 4,基于我们的知识,溅射压力作为制造存储器设备的处理参数的重要性仍然被忽略。在这项工作中,我们发现切换特性受到溅射压力的显着影响。

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