首页> 外文会议>2019年第66回応用物理学会春季学術講演会講演予稿集 >RF Sputtering Pressure Controlled Switching Characteristics of ZnO-based Flexible-Transparent Resistive Memory Devices
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RF Sputtering Pressure Controlled Switching Characteristics of ZnO-based Flexible-Transparent Resistive Memory Devices

机译:ZnO基柔性-透明电阻存储器件的RF溅射压力控制开关特性

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Introduction: Flexible and transparent resistive memory devices have been widely investigated due to their potential use in wearable electronics. The mechanism of resistive memory is controlled by the formation and rupture of the conducting filament inside the storage layer. ZnO is one of the most promising storage layer materials for fabricating such memory devices;ZnO is highly transparent in visible light, low cost and environment-friendly.Various device design and techniques have been proposed in order to improve the ZnO-based resistive memory.4However, based on our knowledge, the importance of sputtering pressure as a processing parameter in fabricating the memory device is still overlooked. In this work, we found that the switching characteristics are significantly influenced by the sputtering pressure.
机译:简介:柔性和透明电阻式存储设备因其在可穿戴电子设备中的潜在用途而受到广泛研究。电阻存储的机制由存储层内部导电丝的形成和破裂控制。 ZnO是制造此类存储器件的最有前途的存储层材料之一; ZnO在可见光下具有高度透明性,低成本和环境友好性。已提出了各种器件设计和技术以改善基于ZnO的电阻存储。 4然而,基于我们的知识,溅射压力作为制造存储器件中的处理参数的重要性仍然被忽略。在这项工作中,我们发现开关特性受到溅射压力的显着影响。

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