Formation of fine pattern of novel alicyclic polyimides based on reaction development patterning using aqueous alkaline developers

摘要

Polyimides prepared from BzDA as an acid dianhydride monomer (Fig. 1) are known to show useful properties, e.g. high solubility, high thermal stability and high transparency of the cast films, due to the bulky alicyclic structure of BzDA. These properties are considered to be suitable for application as a photosensitive polyimide.