Growth of Indium Gallium Arsenide Thin Film on Silicon Substrate by MOCVD Technique

摘要

Indium gallium arsenide (InGaAs) thin film with indium phosphide (InP) buffer has been grown on p-type silicon (100) by Metal Organic Chemical Vapor Deposition (MOCVD) technique. To get a lattice matched substrate an Indium Phosphide buffer thin film is deposited onto Si substrate prior to InGaAs growth. The grown films have been investigated by UV-Vis-NIR reflectance spectroscopy. The band gap energy of the grown InGaAs thin films determined to be 0.82 eV from reflectance spectrum and the films are found to have same thickness for growth between 600 OC and 650 0C. Crystalline quality of the grown films has been studied by grazing incidence X-ray diffractometry (GIXRD).