The Composition and Structure of Gradient Layered Coatings: Doped Titanium Nitride - Dispersion Strengthened Amorphous Carbon

摘要

By changing deposition conditions using the method of plasma assisted magnetron sputtering the authors produced gradient layered coatings of the (Ti,Al,Si,Cu)N-TiC/a-C. Using transmission electron microscopy and X-ray microanalysis, changes in elemental and phase compositions, as well as in the structure of different layers were established. Local stresses at different scales and thicknesses of an amorphous grain-boundary (for TiC crystals) carbon phase were estimated.