Production of a thick walled high wear resistant silicon-free gradient layer on a silicon nitride substrate comprises impregnating the substrate with synthesized titanium/carbon/nitrogen precursor polymers by dip coating, and ceramicizing

摘要

Production of a thick walled high wear resistant silicon-free gradient layer on a silicon nitride substrate (11) comprises impregnating the substrate with synthesized Ti/C/N precursor polymers in flowable form by dip coating; and ceramicizing. An Independent claim is also included for a immersion coating device (1) for carrying out the process comprising a three-way tap (3) connected directly to the vacuum pump (4) of a glove box (2). Preferred Features: The polymers are in liquid form. The coating process is carried out at 250-350 deg C.