Modeling and Simulation of PVDF-TrFE Based MEMS Scale Cantilever Type Energy Harvesters

摘要

In this paper, we present the FEM modeling and simulation of a cantilever type piezoelectric energy harvester (PEH) constructed using PVDF-TrFE. Frequency domain analyses are performed under a 10 μN tip force on the 2D model of a 600 μm-long cantilever, which consists of a 7.25 μm PVDF-TrFE layer on top of a 2 μm SiO_2 film. The same analyses are repeated using ZnO, AlN, and PZT- 5A for comparison. Simulated maximum output powers and corresponding voltages are 60.3 nW at 0.73 V for PVDF-TrFE, 62.0 nW at 0.32 V for ZnO, 12.4 nW at 0.13 V for AlN, and 301.9 nW at 0.07 V for PZT-5A. The effects of a multi-layer approach on the device outputs are also simulated for PVDF-TrFE, which shows that the maximum output power is not affected by the number of layers. Our study demonstrates that PVDF-TrFE, a biocompatible piezoelectric polymer, can be easily used in a single or multi-layer architecture with no significant loss of power; making it an attractive material for energy harvesting.