Micro-Opto-Electro-Mechanical System (MOEMS) has the advantages of small size, light weight, little energy consumption, high reliability, high-volume production and so on. Micro-sensor is a new generation of sensor being developed, improved and expanded, and it will have a huge effect on the measurement area of still adopted traditional sensors. The characteristics and MOEMS manufacturing technologies are introduced. The concept and advantages of micro-sensors are described. The working principle of micro-accelerometer is analyzed. Micro-accelerometer will play an increasingly key role in the new monitoring and control equipments. Pole coupling is the key issue of micro-accelerometer to be resolved, but the rapid developing signal processing technology can provide new solutions to it.
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