Development of MOEMS and Smart Systems Based on Transparent Metals

摘要

This final interim report includes a statement of the problem studied, a summary of the most important results obtained during the development of the work and in the last four months, after the realization and the chracterization of the designed MOEMS prototypes. A detailed description of the etching procedures techniques at the laboratories of CNM, Spain is reported together with the simulations and the experimental measures made at the laboratories of AMSAM-RD-WS-ST, Huntsville AL, USA. A theoretical models of the final transducer is considered thus showing a very high optical sensitivity with respect to the displacement of the realized micro-suspended plates, where the PBG structures will be deposited in the next future.