Differential Equation and Analysis of Micro Gyroscope

摘要

The differential equation(physical model) is derived based on giving the structure and working principle of some micro-gyroscope. The sense and drive equations are solved for analyzing the basic working laws. According to the form of the solutions the motion form is analyzed, and further the performances are analyzed from the view of range, sensitivity, bandwidth, linearity, zero bias and other indicators, and provided theoretical basis for to improve the gyroscope design.