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Study of effect of grain size on dust charging in an RF plasma using three-dimensional PIC-MCC simulations

机译:三维PIC-MCC模拟研究晶粒尺寸对射频血浆灰尘充电的影响

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A 3-dimensional Particle-Particle Particle-Mesh (P3M) code is applied to study the charging process of micrometer size dust grains confined in a capacitive RF discharge. In our model, particles (electrons and ions) are treated kinetically (Particle-in-Cell with Monte Carlo Collisions (PIC-MCC)). In order to accurately resolve the plasma particles' motion close to the dust grain, the PIC technique is supplemented with Molecular Dynamics (MD), employing an an analytic electrostatic potential for the interaction with the dust grain. This allows to self-consistently resolve the dust grain charging due to absorption of plasma electrons and ions. The charging of dust grains confined above lower electrode in a capacitive RF discharge and its dependence on the size and position of the dust is investigated. The results have been compared with laboratory measurements.
机译:应用三维粒子粒子粒子网(P3M)代码来研究千米尺寸粉尘谷物的充电过程,限制在电容式RF放电中。在我们的模型中,颗粒(电子和离子)在动力学上进行治疗(具有蒙特卡罗碰撞(PIC-MCC)的粒子细胞)。为了准确地解析靠近粉尘颗粒的等离子体颗粒运动,PIC技术补充了分子动力学(MD),采用与粉尘晶粒相互作用的分析静电电位。这允许自始终通过吸收等离子体电子和离子来解决粉尘粒度充电。研究了在电容式RF放电中限制在下电极上方的灰尘颗粒的充电及其对灰尘的尺寸和位置的依赖性。结果已经与实验室测量进行了比较。

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