Synthesis and intrinsic stress of Ti-containing carbon nitride nanocomposite films

摘要

Titanium containing carbon nitride (CN_X) films are prepared by radio frequency magnetron sputtering method. The evolution of intrinsic stress within the nanocomposite films is monitored during growth by using an in situ bending-plate method. The effect of Ti-containing concentration on intrinsic stress is investigated. XRD data shows that TiN nanocrystals are synthesized to embed into the CN_X matrix. The film intrinsic stress depends obviously on the content of Ti. We suggest that grain boundary effect is responsible to the intrinsic stress variation as a function of the content of Ti.