Thermal Expansion of Ti-Containing Hydrogenated Amorphous Carbon Nanocomposite Thin Films

摘要

The effective coefficients of thermal expansion (CTE) of Ti- containing hydrogenated amorphous carbon (Ti-C:H) thin films were measured. Ti-C:H thin films with compositions ranging from nearly pure alpha-C:H to nearly pure TiC were deposited on Si(100) substrates. Effective CTEs were determined from temperature induced changes in the curvature of film/substrate assemblies. Measured effective CTE values for Ti-C:H are 5.7 x 10(exp -6) K(exp -1), and show little dependence on the Ti composition.