Development of Large Area Plasma Reactor Using Multiple Low-Inductance Antenna Modules for Flat Panel Display Processing

摘要

This article reports characteristics of plasmas sustained with LIA modules and profile control capabilities. Experiments with a meter-scale reactor demonstrated uniform plasma production to attain densities as high as 5 × 10~(11) cm~(-3) at an argon pressure of 1.3 Pa and an RF power of 4 kW. Design issues for large-area plasma sources with a scale-size of 3 m were also presented to exhibit the feasibility of novel large-area plasma sources to meet the requirements of the next-generation meters-scale processing.