ELECTRON BEAM INJECTED ULTRAHIGH-FREQUENCY PLASMA FOR SUPERIOR PLASMA PROCESSING

摘要

Electron beam injected ultrahigh-frequency (EBUHF) plasma was suggested for the flexible control of the electron energy distribution function (EEDF). By changing the electron beam injection condition, space potential could be changed while electron density and electron temperature were nearly constant. Moreover, it was found that the dissociation ratio in nitrogen EBUHF plasma is increased from 1% (in ultrahigh-frequency plasma) to 3%. Trace rare gas spectroscopy showed that the high-energy tail part of the EEDF could be changed depending on the electron beam injection condition.