Investigation of Mechanical and Electrical Properties of Electroplated Aluminum Film from AlCl_3-EMImCl Ionic Liquid

摘要

This study reports the mechanical and electrical properties of Al thin film deposited by electroplating from ionic liquid (Fig. 1), which is potential for microsystem applications. A pure and uniform Al film was obtained (Fig. 2–3). The mean nanoindentation hardness, Young’s modulus and electrical resistivity were measured as 1.53 GPa, 24.51 GPa and 6.47 μΩ-cm, respectively.