Effects of Laser wavelength on some of physical properties of Al_2O_3 nano films for optoelectronic device

摘要

The high transparent conductive, high quality nano and micro aluminum oxide (Al_2O_3) films were deposited successfully using pulsed laser deposition (PLD) method. The optical results shows a high transparency reached to (83) % and it found to reduction sharply with the low laser fluency. The surface morphology gives a uniforms structure with the average roughness of (0.38 nm).