A novel micro-mirror driven by hybrid photoelectric-electrostatic actuation of PLZT ceramic is proposed based on the anomalous photovoltaic effect of PLZT ceramic. On the basis of analysis of coupling relationships of multi-physics fields of PLZT ceramic, the photovoltage of PLZT ceramic is established during illumination and light off phases. Furthermore, the relationship between the driving displacement and the photovoltage of PLZT ceramics is present. In addition, the feasibility of micro-mirror with hybrid photoelectric-electrostatic driving is verified via closed-loop control for photovoltage of PLZT ceramic. The experimental results show that the photovoltage of PLZT ceramics has good dynamic control precision using on-off closed-loop control method.
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