Finite Element Analysis of PGM Process for Wafer Based Lens Array

摘要

In order to study the PGM process for wafer based lens array, we established a 3D finite element model of glass wafer with lens array by using the submodel technique in ABAQUS. Then assessment criteria of the molded lens and influence of different PGM process parameters were investigated thoroughly. The obtained results show that during the molding stage, proper molding pressure can help the lens fill better and decrease the sag height deviation significantly. While during the annealing stage, holding pressure is essential for keeping the molded lens' structure and position, but residual stress must be considered at the same time.