Crystal lattice orientation analysis of PZT thin film with 10 La content by transmission electron microscopy

摘要

Thin PZT films are one of the prominent materials in majority of chips and devices due to their ferroelectric properties. The main goal of this paper is analysis of the crystallographic orientations along the micro crystals of thin PZT (PbZr_(0.53)Ti_(0.47)O_3) film with 10 % La content. For this purpose, we applied transmission electron microscopy in the diffraction mode, bright- and dark-field modes, the extinction bend contours method, and the stereographic projection. The main goal of the present paper is to study the microstructure and, in particularly, patterns of extinction bend contours of the sample of the thin PZT film with 10 % La content.