Method for producing a sample for transmission electron microscopy analysis of a multilayer thin film formed on a silicon substrate

摘要

The present invention relates to a method for preparing a sample for transmission electron microscopy analysis for grasping information on the crystal grain size and crystal structure of a multilayer thin film material produced with a silicon wafer, It is an object of the present invention to provide a sample for transmission electron microscopy analysis of an improved multi-layered thin film which can more easily and quickly prepare a sample. The present invention relates to a method for producing a sample for transmission electron microscopy analysis of a multi-layer thin film material having a thickness of several tens of micrometers and a silicon (Si) wafer as a base,; Preparing a mixed solution of hydrofluoric acid (HF) containing 17 to 31 wt% of hydrofluoric acid and distilled water, immersing the sample in the mixed solution to separate the thin film from the substrate material, And drying the cleaned thin film. The present invention also relates to a method of preparing a sample for transmission electron microscopy of a multilayer thin film formed on a silicon substrate.