Transparent conductive nanocolumnar AZO film coating by glancing angle deposition technique

摘要

In this work, we deposited nanocolumnar aluminum doped zinc oxide (AZO) film by glancing angle deposition (GLAD) to produce transparent conductive oxide (TCO) film with omnidirectional antireflection property. The crystalline structure, morphology, optical and electrical properties of nanocolumnar AZO film prepared at different sputtering powers were characterized by x-ray diffractrometry, field emission scanning electron microscope, UV-Vis-NIR spectrophometry with angle dependence technique and hall measurement, respectively. From the results, the XRD measurement revealed that the films was the nanocolumnar structure. The average transmisstance in visible region of the nanocolumnar AZO films ranged from 82-86%. Moreover, the nanocolumnar AZO film deposited at 75 W with thickness of 190 nm showed low resistivity of 5.8×10~(-3)Ω·cm and high optical transmittance in the incident-angle range of -80° to 80°. In addition, such nanocolumnar AZO film also promising applied as TCO with omnidirectional antireflection coating for solar cell and optoelectronic applications.