Analysis of electron transport in the nano-scaled Si,SOI and III-V MOSFETs: Si/SiO2 interface charges and quantum mechanical effects

摘要

The ITRS predicts that the scaling of planar CMOS(Complementary Metal Oxide Semiconductor)technology will continue till the 22 nm technology node [1] and a possible extension beyond is appealing [2].In this work,we investigate the effect of electron confinement [3] in nanoscaled transistor channels of 25 nm surface channel Si and 32 nm SOI(Silicon on Insulator)and 15 nm IF(Implant Free)III-V MOSFETs using a self-consistent solution of 1 D Poisson-Schrodinger equation [4,5].For simulation and development with accuracy of nano-scaled of 25 nmgate length Si MOSFET(Metal Oxide Semiconductor Field Effect Transistor),32 nm SOI Implant Free(IF)MOSFET,and 15nm Implant Free III-V MOSFET transistors,we investigated the bandstructure and quantum confinement effects occurring near the oxide-semiconductor interface in Metal-Oxide-Semiconductor(MOS)structure of Si MOSFET device.These investigation have been carried out using a self-consistent solution of 1D Poisson-Schrodinger equation across the channel of conventional Si/SOI/III-V MOSFET Transistors.To solve self-consistently 1D Poisson-Schrodinger equations across the channel of a conventional Si,SOI,and an Implant Free M-V MOSFETs to determine the conduction and valence band profiles,electron density,electron sheet density,eigenstate and eigenfunctions in these structures.We present the simulation results of conduction band profile,electron density(classical and quantum mechanical),eigenstate and eigenfunctions for Si,SOI and III-V MOSFET structures at two different bias voltages of 0.5 V and 1.0 V.For comparison,we calculate the electron sheet density(quantum mechanically)as a function of the applied gate voltages.