Fabrication of A Protruding Si-based Nozzle Structure by MEMS Processes for Electrohydrodynamic Jet Printing

摘要

Printhead with microscale nozzle is very important for electrohydrodynamic jet (E-jet) printing, that decides output performance of system. It is challenge and necessary to design and fabricate a protruding Si-based nozzle strucure for E-jet prining. In this paper, a protruding Si-based nozzle structure is designed and the corresponding fabricating flow chart is introduced based on photolithography, wet etching, magnetron sputtering, inductively coupled plasma. Then, the effect of etching ratio between big area and small section is analyzed and discussed in details. The failure in first time fabrication shows that it is indipensable to not only achieve the process parameters, but also design a set of reasonable fabricating flow chart for manufacturing a Si-baesd nozzle structure sucessfully. Finally, a protruding Si-based nozzle structue is successfully fabricated for E-jet printing.