Three-dimensional measurement based on a Greenough-type stereomicroscope using phase-shifting projection

摘要

We propose an absolute 3D micro surface profile measurement technique based on a Greenough-type stereomicroscope. The camera and the projector are fixed on the stereomicroscope, facilitating a flexible 3D measurement of objects with different heights. Experiments of both calibration and measurements are conducted, and the results show that our proposed method works well for measuring different types of geometry like spheres, ramps and planes etc. The reconstruction accuracy can achieve 4.8 μm with a measurement depth about 3 mm.