Simple multifrequency and phase-shifting fringe-projection system based on two-wavelength lateral shearing interferometry for three-dimensional profilometry

摘要

We propose a simple multifrequency spatial-carrier and phase-shifting fringe-projection system based on two-wavelength lateral shearing interferometry (LSI). In this system a wedge-shaped plate lateral shearing interferometer is used and, owing to the presence of tilt, a finite number of fringes parallel to the direction of the shear appears; hence a significant spatial-carrier frequency is generated at the focus position. We further enhance the spatial-carrier frequency either by changing the wavelength of the laser light or by slight defocusing. A synthetic interferogram with low spatial-carrier frequency is obtained by use of laser light of two wavelengths simultaneously in the lateral shear interferometer. We obtain the phase-shifted fringe patterns from the same setup by simply moving the wedge plate in an in-plane parallel direction, using a linear translator. The fringe projection system was tested for measurement of the three-dimensional shape of a discontinuous object. The present system has many advantages; e.g., it is a common-path interferometry and hence is insensitive to external vibrations, is compact in size, and is relatively inexpensive.