In this study, sputter-deposited Cr3Si film was prepared by double cathode glow discharge (DCGD) technique onto 304 stainless steel. The phase constituents, surface microstructure and chemical compositions of the film were examined by using X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). After the DCGD process, the hardness of Cr3Si film was 26 GPa, about 10 times of the stainless steel, 2.5 GPa. The cavitation erosion resistance of Cr3Si film and stainless steel were investigated by using an ultrasonic vibration cavitation erosion system. After 30 hours of cavitation tests, the cumulative mass loss of Cr3Si film was only 60% of the stainless steel. Compared with the untreated stainless steel, the cavitation erosion resistance of Cr3Si film was improved. The cavitation mechanism of Cr3Si film is due to the delamination and spalling of local surface layer derived from its inherent brittleness.
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