Dynamic Simulation Analysis of Off-axis Sensitivity in a Laterally-driven MEMS Inertia Switch

机译：横向驱动MEMS惯性开关中轴外灵敏度的动态仿真分析

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摘要

A laterally-driven MEMS inertia switch was designed, and its off-axis sensitivity was analyzed and evaluated. The dynamic response process was simulated by ANSYS finite-element model, which indicated that in the designed inertia micro-switch, the distribution of serpentine spring symmetry, the proof mass weight and the whole system stiffness have significant effect on the off-axis sensitivity.

机译：设计了横向驱动的MEMS惯性开关，分析并评估其偏离轴灵敏度。通过ANSYS有限元模型模拟动态响应过程，其指示在设计的惯性微动开关中，蛇形弹簧对称的分布，证据质量重量和整个系统刚度对轴外敏感性有显着影响。

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《International Symposium on Advances in Electrical, Electronics and Computer Engineering》|2016年|350p|共4页
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作者
Qihuan Zhang; Zhuoqing Yang; Guifu Ding;
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中图分类 TP3-53;
关键词
MEMS; Inertial micro-switch; Off-axis sensitivity; Contact enhancement;

机译：MEMS;惯性微开关;轴轴灵敏度;接触增强;

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专利

1. Design and fabrication of a laterally-driven inertial micro-switch with multi-directional constraint structures for lowering off-axis sensitivity [J] . Zhang Qihuan, Yang Zhuoqing, Xu Qiu, Journal of Micromechanics and Microengineering . 2016,第5期

机译：具有多方向约束结构的横向驱动惯性微动开关的设计与制造，以降低轴外灵敏度
2. Design, simulation and characterization of a MEMS inertia switch with flexible CNTs/Cu composite array layer between electrodes for prolonging contact time [J] . Wang Yang, Yang Zhuoqing, Xu Qiu, Journal of Micromechanics and Microengineering . 2015,第8期

机译：电极之间具有柔性CNTs / Cu复合阵列层的MEMS惯性开关的设计，仿真和表征，可延长接触时间
3. Discrete Adjoint Sensitivity Analysis of Hybrid Dynamical Systems With Switching [J] . Hong Zhang, Shrirang Abhyankar, Emil Constantinescu, IEEE transactions on circuits and systems . I , Regular papers . 2017,第5期

机译：具有切换的混合动力系统的离散伴随灵敏度分析
4. Dynamic Simulation Analysis of Off-axis Sensitivity in a Laterally-driven MEMS Inertia Switch [C] . Qihuan Zhang, Zhuoqing Yang, Guifu Ding International Symposium on Advances in Electrical, Electronics and Computer Engineering . 2016

机译：横向驱动MEMS惯性开关中轴外灵敏度的动态仿真分析
5. Simulation and analysis of micro-electro-mechanical systems (MEMS) with applications of sensitivity analysis and optimization. [D] . Shi, Fan. 1995

机译：微机电系统（MEMS）的仿真和分析，以及灵敏度分析和优化的应用。
6. Switch of Sensitivity Dynamics Revealed with DyGloSA Toolbox for Dynamical Global Sensitivity Analysis as an Early Warning for Systems Critical Transition [O] . Tatiana Baumuratova, Simona Dobre, Thierry Bastogne, -1

机译：DyGloSA工具箱揭示了动态灵敏度的变化可进行动态全局灵敏度分析作为系统关键过渡的预警
7. Dynamic Simulation Analysis of Off-axis Sensitivity in a Laterally-driven MEMS Inertia Switch [O] . Qihuan Zhang, Zhuoqing Yang, Guifu Ding 2016

机译：横向驱动MEMS惯性开关中轴外灵敏度的动态仿真分析

Dynamic Simulation Analysis of Off-axis Sensitivity in a Laterally-driven MEMS Inertia Switch

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