Research Progress of Quartz Tuning Fork Micromachined Gyroscope

摘要

This paper presents a review of the working principle, the development and the research progress of the quartz tuning fork micromachined gyroscopes. Then, the fabrication process, the performance parameters and the application fields of the QRS are illustrated. Next, the development trends and the existing problems are analyzed, including the uneven crystal edges of the quartz sidewall caused by the fabrication process, the confined etchant layer technology and the electrode fabrication technique. In summary, the QRSs are widely applied in many fields, including military and commercial applications, because of its small size, lightweight, low power consumption, high resistance to overload and availability in harsh environments.