MEMS FPI-based smartphone hyperspectral imager

摘要

This paper demonstrates a mobile phone- compatible hyperspectral imager based on a tunable MEMS Fabry-Perot interferometer. The realized iPhone 5s hyperspectral imager (HSI) demonstrator utilizes MEMS FPI tunable filter for visible-range, which consist of atomic layer deposited (ALD) Al_2O_3/TiO_2-thin film Bragg reflectors. Characterization results for the mobile phone hyperspectral imager utilizing MEMS FPI chip optimized for 500 nm is presented; the operation range is λ = 450 － 550 nm with FWHM between 8-15 nm. Also a configuration of two cascaded FPIs (λ = 500 nm and λ = 650 nm) combined with an RGB colour camera is presented. With this tandem configuration, the overall wavelength tuning range of MEMS hyperspectral imagers can be extended to cover a larger range than with a single FPI chip. The potential applications of mobile hyperspectral imagers in the vis-NIR range include authentication, counterfeit detection and potential health/wellness and food sensing applications.