Molecular-dynamic investigation of influence of inhomogeneity in thermophysical properties of slot structure surface on spatial distribution of energy and molecular flows

摘要

To describe the processes of heat and mass transfer in high-aspect slot structures a hybrid model is proposed that is a combination of molecular dynamics and Monte Carlo methods. It was shown that the geometric model of the MOCVD reactor used for calculations adequately describes the processes in a real experimental reactor. It was established that the presence of thermal heterogeneity on one side of the gap structure leads to a significant change in molecular, energy and impulse flows on the opposite side.