The effect of Si additions and deposition conditions on the structure and properties of the (Zr-Ti-Cr-Nb-Si)N coatings fabricated by vacuum-arc deposition

摘要

The coatings based on (Zr-Ti-Cr-Nb-Si)N were fabricated by vacuum-arc deposition in the nitrogen atmosphere. The chemical composition, morphology and mechanical properties under different deposition conditions have been studied. Effects of Si additions have been investigated using SEM with EDS, XRD, RBS, TEM, hardness measurements and adhesion testing. The multi-component (Zr-Ti-Cr-Nb-Si)N coatings are found to be a simple face-centered cubic (FCC) solid solution. The mechanical and tribological properties of the nitride coatings were strongly influenced by the microstructure. The hardness values were in 21-42 GPa ranges. It has been determined, that the coatings with high hardness possess good adhesive strength.