The Research of a Laser Micro Displacement Measuring System Based on the Spectral Interference of Optic Fiber Principle

摘要

In this article, a design of a laser micro displacement measuring system based on the spectral interference of optic fiber principle is presented. This system makes the transmission and interference of laser occur in a single fiber. At the same time, a kind of athermalization probe based on the wedge-shaped fiber and angulated to the fiber is designed, improving the anti-interference ability of the system. Besides, a model of the spectral interference of optical fiber system with the center wavelength of 1550 nm has been set up. The measurement accuracy of the system can research 300 nm and the measurement range can research around 1mm. The system not only has good anti-interference ability but also solves the problem of the coexistence of the nanometer-level measurement accuracy and the large-span measurement range.