Synthesis and Investigation of MoO_3 Microfilms and Nanorods by Thermal Chemical Vapor Deposition

摘要

MoO_3 microfilms and nanorods can be synthesized by using the powder of MoS_2 as starting materials by thermal chemical vapor deposition (TCVD). The prepared products on substrates were investigated by field emission scanning electron microscope (FESEM), X-ray photoemission spectroscopy (XPS) and Raman spectroscopy. FESEM images showed the uniform microfilms and nanorods-like structures with diameter around 50-100 nm and length of about 3-6 μm, respectively. XPS patterns and Raman shifts revealed the prepared products consisting of MoO_3 structure phases.