Accuracy of Three-Dimensional Shape Measurement using a Triangulation Method Sensor with Optical Skid

摘要

On-machine measurement is used in ultra-processing machining, but it is seldom used in precision machining. For on-machine measurement, it is necessary that the sensor not be easily affected by the moving error or environment vibration in the field of precision machining. A triangulation method sensor with the optical skid method made using a new design concept is proposed to remove the moving error and vibration. The optical skid method used two laser spots with different sizes: the small spot diameter is the stylus and the large spot diameter is the skid f 1]. The difference between these two signals reflects the surface shape. The developed sensor comprises an optical source and two optical receiving systems. Each optical receiving system has an imaging lens and a detector. Instead of two laser spots of different sizes, two detectors with different sizes of receiving area serve as the optical skid. Results confirmed the possibility of reducing the influence of the vibration using the developed sensor. In on-machine measurements, measurement of the surface profile with long wavelength is often necessary. If the spot diameter of the skid is not much larger than the surface profile wavelength, then the smoothing effect of the skid is reduced. Therefore, the amplitude of the measured profile by the skid sensor is smaller than actual amplitude of the workpiece. This paper presents a method of reconstructing the surface profile from the measurement results and the obtained effects of the reconstruction method from simulations and experiments.