Smoothing of GaN substrate by ultraviolet assisted polishing in KOH solution

摘要

In this study, we investigated the possibility of smoothing a GaN substrate utilizing ultraviolet (UV) assisted polishing method in potassium hydroxide (KOH) solution. In this polishing method, GaN substrate was excited by an UV radiation, and then an oxide layer on the GaN substrate was formed by photochemical reaction. Simultaneously, generated oxide layer was removed by synthetic quartz tool and chemically etched by KOH solution. Finally, smoothed GaN surface could be realized. The surface quality and removal depth were measured and evaluated using a scanning white light interferometer and Normalski type differential interference microscopy. Obtained results show that the surface morphology and the removal rate are strongly dependent on the existence of the UV irradiation. Moreover, the processed surface has revealed that many scratches on the preprocessed GaN surface could be completely removed. The microroughness of the processed GaN surface profile was improved to be 0.18 nm (Rms), 1.06 nm (Rz).