Properties of Mg Doped ZnO Films Prepared by Ultrasonic Spray Pyrolysis

摘要

This work is focused on the preparation of Mg doped ZnO films by ultrasonic spray pyrolysis and investigated the physical, optical and electrical properties of the films. These films were prepared from 0.02 M of Zn(CH_3OO)_2·2H_2O and MgCl_2 was used for doping. The atomic percentage (at.%) ratio of Mg/Zn was varied from 0 to 9 at.%. The crystalline phase of all films was identified as ZnO polycrystalline structure with preferred orientation along the (002) plane. While, the grain shape of ZnO film was irregular shape, this shape changed to spherical shape by doping Mg and changed again to rod shape by doped Mg with concentration of 9 at.%. Although, the Mg dopant affects the shape of ZnO films but does not affect resistivity of the films. Moreover, the Mg dopant shifts the absorption edge in transmittance spectra of the films to lower wavelength and increases band gap of the films.