High Performance Current-Voltage Characterization System for High Resistance Materials

摘要

The resistivity measurement finds many applications in semiconductors and insulating materials characterization. Conventional digital multimeter can provide resistance measurement up to about 10-200MΩ. However, in some cases, resistances in gigaohms (GΩs) and higher ranges need to be measured accurately. To measure the resistance of high resistivity materials, a programmable voltage source (-100V to +100V) combined with an electrometer system (100pA -10mA) have been built. The electrometer system and programmable voltage source have been calibrated with a calibrator (Fluke 5100B series) and digital multimeter (Fluke 8808A). Materials resistance up to 10 GΩ can be obtained by measuring the current-voltage (I-V) characteristics. It is found that the I-V curve of the 10 GΩ resistor fits very well the linear function with a high linear regression coefficient R2 of 0.999.