The Optical Properties and the Structure of CuInS_2 Thin Films Deposited by Oblique Angle Deposition Technique

摘要

The oblique angle deposition (OAD) technique was used to deposit copper indium disulfide (CuInS_2) films onto glass substrates by a vacuum thermal evaporation method. The powder source used in this work was obtained from the crushed CuInS_2 polycrystalline ingot grown by Vertical Bridgeman method. In order to study the influences of depositing angle on the optical property and the structure of the CuInS_2 films, the depositing angle 0 was varied from 10° to 70° with a 30° gradient. These films were characterized by SEM, XRD and UV-Vis spectrophotometer. The results showed that the optical property and the structure of the films were closely related to the depositing angle 0. When the depositing angle 0 increased, the band gap increased and the intensity of (112) characteristic peak of the CuInS_2 films decreased.