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Method of forming thin-film structure by oblique-angle deposition
Method of forming thin-film structure by oblique-angle deposition
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机译:通过斜角沉积形成薄膜结构的方法
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摘要
A method of forming thin-film structure by oblique-angle deposition is provided. The method includes the steps of: evaporating target source in a chamber by an electron beam evaporation system, and introducing process gas into the chamber and adjusting tilt angle of the evaporation substrate and controlling temperature in the chamber during evaporation to form thin-film on a evaporation substrate by oblique-angle deposition, and then annealing the evaporation substrate to form a thin-film having porous nanorod microstructure.
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