Fabrication of Lanthanum Titanium Oxide Optical Thin Films by Sputtering Method

摘要

We prepared lanthanum titanium oxide optical films by RF magnetron sputtering from pressed powder and sintered targets under different RF powers and O2 flow rates. All films fabricated from sintered targets showed compressive internal stress. The compressive stress increased with RF power and O2 flow rate. The refractive index of pressed powder target films decreased as the RF power increased, although that of sintered target films increased. The Ti 2p XPS spectra of the films were different, whereas the La 3d and O 1s XPS-spectra were similar, suggesting that the differences in the Ti 2p XPS spectra arose from the stress.