The Influence of Package Atmospheres on Resonance Performance of Micromechanical Radial-Contour Disk Resonator

摘要

Owing to high performance and tiny size, micromechanical radial-contour disk resonator as competitive candidate demonstrates an impressive prospect to replace traditional frequency selecting module in RF devices, so as to improve performance of modern RF transceivers. The influence of package atmospheres on resonance performance of micromechanical radial-contour disk resonator was investigated. By model construction and FEM calculation, resonance performance of micromechanical radial-contour disk resonator was analyzed, which indicate its resonance frequency as well as unique deformation style. In addition, effect on resonance performance of radial-contour disk resonator caused by package atmosphere was analyzed. The analysis result of resonance parameters variation of resonator immerged in different gases reveals that as the gas viscosity increases, the resonance frequency decreases. The phenomenon was interpreted by damping effect and recovery delay of disk deformation introduced by gases, which can be a reference for micromechanical resonator design and package selection in different applications.