New rotatable magnetrons and target materials: Enabling higher performance sputter coatings

摘要

Sputter coating of high quality layers and stacks on flexible polymer substrates is of growing interest for a wide portfolio of high‐end applications. Realizing the desired combination of optical, electrical and mechanical layer properties while sustaining long term stable, uniform and high yield deposition processes puts stringent requirements on magnetron and target material quality. The rotatable magnetron technology and cylindrical target materials have evolved significantly and may offer unique capabilities for achieving these performance expectations.