Roll-to-roll flexible electronic device fabrication on glass web

摘要

Substrate choice is critical for overall flexible electronic device and process optimization. Compared to alternatives, glass substrates offer advantages of dimensional and thermal stability, hermeticity, transparency, and surface quality. This paper discusses flexible glass properties that enable high-performance devices using roll-to-roll (R2R) processes. With a specific focus on mechanical reliability, use of glass web has been demonstrated in R2R processes such as: vacuum deposition, slot die coating, lamination, photolithography and patterning, and printing. These serve as key building block processes for fabrication of functional flexible glass devices completely in R2R manufacturing.