Motion and Force Analysis in Pantograph Mechanism for Micro- Nano Patterning

摘要

In order to meet the growing demand of direct patterning over solid surfaces in micro-nano scale, a pantograph based mechanism has been developed. This mechanism ensures the precision positioning of tool tip while retaining the tool tip orientation irrespective of scratch depth unlike cantilever mechanism used in AFM systems. This mechanism provides one DOF motion in XZ plane at V4 of the motion induced at driving point by the linear actuator. The design of pantograph mechanism including analysis performed on motion and force transfer between actuator and the tool tip is presented.