Design and simulation analysis of two-phase grating-type displacement sensors with unequal-pitch

摘要

With the development of grating displacement sensors towards higher precision and higher speed of dynamic responses, the traditional design structure is hard to solve the processing difficulty of the increasing number of poles for time grating sensors. In order to realize the analysis on the internal magnetic field distribution of high precision displacement sensor, the unequal pitch grating displacement sensor with two phase model is established using Ansoft Maxwell simulation environment. The feasibility of the two unequal pitch grating displacement sensor and magnetic field simulation are performed based on the proposed sensor model. In addition the detailed synthetic method is proposed for the simulation data. The analysis show the feasibility of the unequal pitch grating displacement sensor with two phase. The proposed displacement sensor decreases the difficulties of machining process technology and increase the pole number. As the result, the measuring precision is improved.