Preparation of La_(0.9)Sr_(0.1)Ga_(0.8)Mg_(0.2)O_(3-δ) electrolyte films deposited by RF magnetic sputtering

摘要

La_(0.9)Sr_(0.1)Ga_(0.8)Mg_(0.2)O_(3-δ) (LSGM) electrolyte materials were synthesized using solid state reactions. The LSGM material film was deposited by radiofrequency magnetic sputtering on La_(0.7)Sr_(0.3)Cr_(0.5)Mn_(0.5)O_(3-δ) (LSCM) substrates. The analysis results show the films did not form but formed some “mountains” when deposited for 4 h. While the depositing time extended to 12 h, a dense and uniform film with perovskite phase was obtained, and the element amounts of the film were closed to those of the LSGM materials.